High Performance Cascade Microtech Probe System

Recently, the Antenna Laboratory acquired an MPS150, a high performance Cascade Microtech probe system (see figure below). The MPS150 is an easy-to-use, yet highly-precise, manual probe system for wafers and substrates up to 150 mm. It supports a wide variety of applications, such as I-V/C-V, RF, mm-wave and sub-THz measurements, device characterization, failure analysis (FA), sub-micron probing, MEMS, optoelectronic engineering tests and more.

The probe system currently can be used up to 110 GHz with dedicated waveguide probes, together with the Agilent PNA-X with external mm-Wave sources.



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